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High Clarity Optical Borosilicate Glass Substrates In Semiconductor

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High Clarity Optical Borosilicate Glass Substrates In Semiconductor

Brand Name : LONGWAY

Model Number : KK253122

Certification : ISO9001

Place of Origin : China

MOQ : 500 pieces

Price : NEGOTIATION

Payment Terms : D/P,T/T,Western Union

Supply Ability : 30000 Pieces per Month

Packaging Details : electrolytic capacitor paper,foam,carton

Shape : Flat

Surface : Clear and transparent

Transmission : >90%

Coating : Available

Processing : Polishing

Application : Optics

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High Clarity Optical Borosilicate Glass Substrates In Semiconductor


Material:

  • Base Composition: Primarily silicon dioxide (SiO₂) and boron trioxide (B₂O₃) , with minimal alkali content.

  • Manufacturing: Produced via continuous melting in platinum-lined furnaces to ensure extreme purity and homogeneity. Often polished to sub-nanometer surface roughness.

  • Key Additives: Precise additions of alumina (Al₂O₃) for chemical stability and refining agents to eliminate bubbles/impurities.

Key Properties:

  1. Exceptional Optical Clarity: Ultra-high light transmission (>90%) across UV to NIR spectra (e.g., 185nm-2μm), minimal autofluorescence.

  2. Low Thermal Expansion (CTE): Extremely low CTE (∼3.3 × 10⁻⁶/K at 20°C), matching silicon wafers to prevent stress-induced failure during thermal cycling.

  3. Superior Thermal & Chemical Resistance: Withstands aggressive semiconductor processes:

    • Thermal: Stable up to 500°C; resists thermal shock from rapid heating/cooling.

    • Chemical: Inert to acids, alkalis, and solvents (e.g., photoresist developers, etchants).

  4. High Surface Quality: Near-atomic smoothness (<0.5nm Ra) critical for nanolithography and thin-film deposition.

  5. Low Ionic Contamination: Minimal alkali ion migration (Na⁺, K⁺) prevents device contamination.

  6. Mechanical Stability: High Young’s modulus (∼64 GPa) ensures dimensional rigidity under processing stress.

Primary Function:

  • To serve as an ultra-stable, inert platform for semiconductor fabrication processes.

  • Provides a defect-free surface for high-resolution patterning (e.g., EUV photomasks).

  • Acts as a protective window for sensors and optics in harsh environments.

  • Enables precise light transmission for inspection, metrology, and lithography systems.

Main Applications in Semiconductor:

  1. Photomask Blanks: Base material for EUV/ArF photolithography masks requiring near-zero defects.

  2. MEMS & Sensor Covers: Hermetic sealing caps for pressure sensors, IR detectors, and MEMS devices.

  3. Wafer Handling Components: Carrier plates, inspection windows, and alignment stages in wafer processing tools.

  4. Advanced Packaging: Interposers and substrates for 2.5D/3D IC integration.

  5. Process Equipment Optics: Lenses, viewports, and mirrors in plasma etchers, CVD chambers, and laser tools.

  6. Metrology & Inspection: Critical for high-precision alignment systems and defect scanners.

In essence: High Clarity Optical Borosilicate Glass Substrates are ultra-pure, thermally stable engineered materials essential for semiconductor manufacturing. Their unique combination of near-perfect optical transmission, near-zero thermal expansion, chemical inertness, and atomic-level surface flatness enables nanometer-scale precision in photolithography, protects sensitive components, and ensures reliability in extreme process environments. These substrates directly support yield and performance in advanced nodes (e.g., sub-5nm), MEMS production, and next-generation packaging.


Item Glass disc, Glass wafer, Glass substrate
Material Optical glass, Qurartz glass, borosilicate glass, Float glass, borofloat
Diameter Tolerance +0/-0.2 mm
Thickness Tolerance +/-0.2 mm
Processed By Cutting,Grinding,Tempering, Polishing
Surface Quality 80/50,60/40,40/20
Material Quality No scratches and air bubble
Transmission >90% for visible light
Chamfer 0.1-0.3 mm x 45 degree
Surface Coating Available
Usage Photography, Optics, Lighting system, industrial area.


High Clarity Optical Borosilicate Glass Substrates In Semiconductor


High Clarity Optical Borosilicate Glass Substrates In Semiconductor


High Clarity Optical Borosilicate Glass Substrates In Semiconductor





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High Clarity Optical Borosilicate Glass Substrates

      

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