Sign In | Join Free | My chinacomputerparts.com |
|
Brand Name : LONGWAY
Model Number : KK253122
Certification : ISO9001
Place of Origin : China
MOQ : 500 pieces
Price : NEGOTIATION
Payment Terms : D/P,T/T,Western Union
Supply Ability : 30000 Pieces per Month
Packaging Details : electrolytic capacitor paper,foam,carton
Shape : Flat
Surface : Clear and transparent
Transmission : >90%
Coating : Available
Processing : Polishing
Application : Optics
High Clarity Optical Borosilicate Glass Substrates In Semiconductor
Material:
Base Composition: Primarily silicon dioxide (SiO₂) and boron trioxide (B₂O₃) , with minimal alkali content.
Manufacturing: Produced via continuous melting in platinum-lined furnaces to ensure extreme purity and homogeneity. Often polished to sub-nanometer surface roughness.
Key Additives: Precise additions of alumina (Al₂O₃) for chemical stability and refining agents to eliminate bubbles/impurities.
Key Properties:
Exceptional Optical Clarity: Ultra-high light transmission (>90%) across UV to NIR spectra (e.g., 185nm-2μm), minimal autofluorescence.
Low Thermal Expansion (CTE): Extremely low CTE (∼3.3 × 10⁻⁶/K at 20°C), matching silicon wafers to prevent stress-induced failure during thermal cycling.
Superior Thermal & Chemical Resistance: Withstands aggressive semiconductor processes:
Thermal: Stable up to 500°C; resists thermal shock from rapid heating/cooling.
Chemical: Inert to acids, alkalis, and solvents (e.g., photoresist developers, etchants).
High Surface Quality: Near-atomic smoothness (<0.5nm Ra) critical for nanolithography and thin-film deposition.
Low Ionic Contamination: Minimal alkali ion migration (Na⁺, K⁺) prevents device contamination.
Mechanical Stability: High Young’s modulus (∼64 GPa) ensures dimensional rigidity under processing stress.
Primary Function:
To serve as an ultra-stable, inert platform for semiconductor fabrication processes.
Provides a defect-free surface for high-resolution patterning (e.g., EUV photomasks).
Acts as a protective window for sensors and optics in harsh environments.
Enables precise light transmission for inspection, metrology, and lithography systems.
Main Applications in Semiconductor:
Photomask Blanks: Base material for EUV/ArF photolithography masks requiring near-zero defects.
MEMS & Sensor Covers: Hermetic sealing caps for pressure sensors, IR detectors, and MEMS devices.
Wafer Handling Components: Carrier plates, inspection windows, and alignment stages in wafer processing tools.
Advanced Packaging: Interposers and substrates for 2.5D/3D IC integration.
Process Equipment Optics: Lenses, viewports, and mirrors in plasma etchers, CVD chambers, and laser tools.
Metrology & Inspection: Critical for high-precision alignment systems and defect scanners.
In essence: High Clarity Optical Borosilicate Glass Substrates are ultra-pure, thermally stable engineered materials essential for semiconductor manufacturing. Their unique combination of near-perfect optical transmission, near-zero thermal expansion, chemical inertness, and atomic-level surface flatness enables nanometer-scale precision in photolithography, protects sensitive components, and ensures reliability in extreme process environments. These substrates directly support yield and performance in advanced nodes (e.g., sub-5nm), MEMS production, and next-generation packaging.
Item | Glass disc, Glass wafer, Glass substrate |
Material | Optical glass, Qurartz glass, borosilicate glass, Float glass, borofloat |
Diameter Tolerance | +0/-0.2 mm |
Thickness Tolerance | +/-0.2 mm |
Processed | By Cutting,Grinding,Tempering, Polishing |
Surface Quality | 80/50,60/40,40/20 |
Material Quality | No scratches and air bubble |
Transmission | >90% for visible light |
Chamfer | 0.1-0.3 mm x 45 degree |
Surface Coating | Available |
Usage | Photography, Optics, Lighting system, industrial area. |
![]() |
High Clarity Optical Borosilicate Glass Substrates In Semiconductor Images |